Nano-structured coatings

• by adding into an alloy solid amorphous phase which leads to reducing crystallite size and correspondingly to forming nano-structured compositions: TiAlN+Si, TiMoN+Si, TiCrN;
• sputtering of multi-layered coatings where crystalloid layers alternate with nano-films;



• forming of nano-structures by using the high deposition rates while sputtering mosaic targets;
• forming of nano-structures by using ion assistance