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Magnetron with tubular cathodes of ТК
Magnetron with tubular cathodes of ТК — series and movable magnetic system:
The magnetrons are of: (i) the following sizes: diameter = 10 mm and > and length up to 7500 mm and (ii) movable magnetic system which can be mono- or multi-sectional.
In the mono sectional magnetic system the power density could reach 103 W/сm2 when the sputtering goes out solid phase and 104W/сm2 when the sputtering goes out liquid phase.
The liquid-phase sputtering is to take place under the following conditions: (i) the linear speed of magnetic system moving is higher than 100 mm/sec, and (ii) very intensive cathode water cooling with the water temperature 10-12оС.
Specially designed magnetic system allows having deposition under the distance between substrate and cathode = 7-10 mm.
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