Magnetrons

Inacotec proposes high deposition ion-plasma magnetron sputtering systems (HDRMSS) with 3 types of cathodes: round, planar, tubular.

 
Basic parameters
Typical sizes of working chamber: height  
(mm)/ magnetron number (pie)
600/4
1000/6
Electric power, KW
60
180
Height of  sputtering working zone, mm
400
850
Max. diameter of  planetary carousel, mm
650
850
Weight of parts on carousel to be deposited, kg
up to 150
up to 350
Power density in discharge, W/m2
up to 500
up to 300
Coating deposition rate,
mm /h       
up to 150
up to 80
Areacoatingcapacity , dm2
160-480
450-1350


Distinctive particularity of those systems is:
  • Direct intensive cooling of sputtering target which permits to have high density power in discharge up to 102 W/sm2;
  • Highly balanced magnetic field allowing to reach high plasma concentration;
  • Design simplicity and easiness in assembling and employing , , , ;
  • Possibility to sputter different materials placed in a mosaic target at the same deposition rate.
The sputtering systems proposed are: Basic parameters for some magnetron types of series: D, P, , V:
  • The number shown after series is a basic cathode size, for instance: D-50 disk cathode of 50 mm in diameter, or P-300 planar cathode of 300 mm in length, or -25 tubular cathode of 25 mm in diameter.

Basic parameters for some magnetron types of series: DK, P, , V:

 

Design  Characteristics

        Discharge energy characteristics

Possible

Cathode

Amount

    On

Flange

  (pie)

Target types

Basic sizes, mm

Magnetic system

      (MS)

Minimum

sputtering

distance

   (mm)

       

           Power

Current

dischar.

max (A)

 

Voltage

dischar.min-max (V)

 

Disk

Ø

 

Tube

 max

   L
  Ø
 

 

 

Plates,

 LxB

 

MS Type,

Magnet

material

Target max

erosion zone

 (mm2)

   Max

(W)

Density

(W/ m2)

 

1

2

3

4

5

6

7

8

9

10

11

12

 

1

 

2

5

 

4

50

 

100

-

 

-

-

 

-

Immovable

SmCo5

NdFeB,

SmCo5

6,5

 

25,6

25

 

25

2

< 300

5

10

450-

600

 

3

4

5

6

2

2

2

1

-

-

-

-

-

-

-

-

30070

35070

50070

75080

Immovable

FeBa

NdFeB,

SmCo5

-

-

-

108

118

155

216

35

35

35

35

 

10-

50

 

< 250

20

25

35

45

350-600

 

7

 

8

1

 

1

-

 

-

-

 

-

50080

 

75080

Movable

SmCo5

 

Movable

SmCo5

36

 

36

25

 

25

12

 

12

< 500

< 500

20

 

20

350-

700

350-700

 

9

1

-

-

1500100

Immovable

SmCo5

410

35

70

< 200

<100

350-600

 

10

 

11

 

12

1

 

1

 

1

-

 

-

 

-

10-50

25

 

25-100

25

 

25-100

50

-

 

-

 

-

Movable

SmCo5

 

Movable

SmCo5

 

Movable

SmCo5

 

142

 

242

 

3112

10

 

10

 

10

2

 

 

 

10

 

< 500

< 1200

5

 

15

 

25

 

250-350

13

1

-

40

-

Movable

SmCo5

6102

10

25

 

35

250-350