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Magnetrons
Inacotec proposes high deposition ion-plasma magnetron sputtering systems (HDRMSS) with 3 types of cathodes: round, planar, tubular.
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Basic parameters
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Typical sizes of working chamber: height
(mm)/ magnetron number (pie)
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600/4
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1000/6
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Electric power, KW
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60
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180
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Height of sputtering working zone, mm
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400
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850
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Max. diameter of planetary carousel, mm
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650
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850
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Weight of parts on carousel to be deposited, kg
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up to 150
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up to 350
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Power density in discharge, W/сm2
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up to 500
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up to 300
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Coating deposition rate,
mm /h
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up to 150
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up to 80
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Areacoatingcapacity , dm2
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160-480
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450-1350
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Distinctive particularity of those systems is:
- Direct intensive cooling of sputtering target which permits to have high density power in discharge up to 102 W/sm2;
- Highly balanced magnetic field allowing to reach high plasma concentration;
- Design simplicity and easiness in assembling and employing в сборке и эксплуатации, что обеспечивает оптимальное расположение, как внутри камеры, так и на съемных крышках и фланцах;
- Possibility to sputter different materials placed in a mosaic target at the same deposition rate.
The sputtering systems proposed are:
Basic parameters for some magnetron types of series: DК, PК, ТК, VК:
- The number shown after series is a basic cathode size, for instance: DК-50 – disk cathode of 50 mm in diameter, or PК-300 – planar cathode of 300 mm in length, or ТК-25 – tubular cathode of 25 mm in diameter.
Basic parameters for some magnetron types of series: DK, PК, ТК, VК:
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№№
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Design Characteristics
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Discharge energy characteristics
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Possible
Cathode
Amount
On
Flange
(pie)
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Target types
Basic sizes, mm
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Magnetic system
(MS)
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Minimum
sputtering
distance
(mm)
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Power
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Current
dischar.
max (A)
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Voltage
dischar.min-max (V)
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Disk
Ø
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Tube
max
L
Ø
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Plates,
LxB
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MS Type,
Magnet
material
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Target max
erosion zone
(mm2)
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Max
(КW)
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Density
(W/ сm2)
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1
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2
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3
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4
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5
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6
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7
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8
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9
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10
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11
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12
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1
2
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5
4
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50
100
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-
-
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-
-
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Immovable
SmCo5
NdFeB,
SmCo5
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6,5
25,6
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25
25
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2
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< 300
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5
10
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450-
600
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3
4
5
6
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2
2
2
1
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-
-
-
-
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-
-
-
-
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300х70
350х70
500х70
750х80
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Immovable
FeBa
NdFeB,
SmCo5
-
-
-
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108
118
155
216
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35
35
35
35
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10-
50
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< 250
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20
25
35
45
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350-600
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7
8
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1
1
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-
-
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-
-
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500х80
750х80
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Movable
SmCo5
Movable
SmCo5
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36
36
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25
25
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12
12
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< 500
< 500
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20
20
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350-
700
350-700
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9
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1
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-
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-
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1500х100
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Immovable
SmCo5
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410
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35
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70
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< 200
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<100
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350-600
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10
11
12
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1
1
1
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-
-
-
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10-50
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-
-
-
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Movable
SmCo5
Movable
SmCo5
Movable
SmCo5
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1х4см2
2х4см2
3х11см2
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10
10
10
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2
10
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< 500
< 1200
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5
15
25
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250-350
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13
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1
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-
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40
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-
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Movable
SmCo5
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6х10см2
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10
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25
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35
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250-350
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