Implantors

  • Inacotec’s unique elaboration is equipment for vacuum ion-beam materials treatment in the engineering industries (Note: ion implantation installations is widely used for > 50 years in the microelectronics; fortunately, such technique has recently started being employed in the engineering industries)
  • Inacotec’s ion-beam technologies have allowed to harden and increase the fatigue strength of aircraft engines compression blades; for the purpose an implantor of “Vita” series was utilized.
  • Since late 90-ies of the past century an industrial facilities with “Vita” implantors has been functioning at the Ufa motor-building works.
  • At present, also Implantors of “Sokol” series are well utilized in research work and industry.

Basic results having got by the above implantors are given below:
Implantor "Sokol"

  • The increase in wear-resistance and cutting speed of milling Ti-materials by 3 times (ÎŔÎ “NPO Saturn”, Rybinsk).
  • The elaboration of a coating with high surface electrical capacitance and low residual polarization for electrodes of electro cardio-stimulators (ZAO “Cardioelectronika”, Klimovsk, Moscow region).
  • The elaboration of new series of low friction dry coatings (MGTU MISIS, Moscow).
  • The method to rise nitride coatings wear resistance in cutting tools (MGTU “Stankin” Moscow, Otto fon Gerike University, Magdeburg, FRG).
  • The increase by > 2 times of wear resistance for hard-alloy blades while cutting the wheel flanges/ribs of railway cars (Voitovich plant, Moscow)

Implantor "Vita"


Basic parameters of the implantors are given in the below table:



 Implantor name:
 

     Vita

         Sokol
         20/50

Sokol 50/50

Sokol 30/100

   Sokol Universal

Parameters (below)

 

 

 

 

 

Maximum energy for mono-charged
Ions, keV 

    
      50

 
        50

 
   50

 
   30

 
    50

Maximum mean current,  ěŔ

      30

        20

   50

 100

 100

 
Type of Ion source

Stationary Gaseous
Friman’s source type)

Impulse-arc
 (Brown’s source type) – IA

 
    IA

 
 IA

 
  IA

Max impulse current, A

 

          3

    5

   10

   10

 
     Ions of

Gases and fusible metals
& other metals  

Refractory & medium fusible metals (IRMFĚ)

 
IRMFĚ

 
IRMFĚ

IRMFĚ & gases ions  

Max speed of reaching implantation dose
Ion/seń.ńm2 ő10 14

 
         5

 
          2

 
     5

 
    10

 
    10

 
Applications

Ion implantation (II)

II + assisting
(IBAD)

   II+
IBAD

 II+
IBAD

 
 II+IBAD