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Arc evaporator
Arc evaporators are designed to have a vacuum coating deposition onto different parts/articles.
The Arc evaporator functioning is based on vacuum arc discharge from integrally «cold» cathode which exclusively burns in the cathode material vapors.
During the vacuum arc firing the contraction inside cathode target brings the formation of a cathode spot which gives the vapor of evaporated material; in its turn the appeared vapor is getting ionized in the electric field near the cathode.
Thus the formed plasma is practically completely ionized and consists of multi-charged ions and droplet phase from target material; the droplet phase share is for (i) fusible metals ~ 10% and (ii) refractory metals ~1%.
Mean energy of generating ions is high and reaches 40…100eV (differs for various materials), and the ionization degree of cathode material is 50%…90%
In general an Arc Evaporator consists of the following:
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