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Installation with linear transporter
It designed to vacuum deposit the coatings of 0,01 — 10 m and > (from metals and alloys; chemical compounds of metals with N, O, C, B, Si, S and their mixtures) on to plate and volumetric parts made metal, glass, ceramics, plastics.
Such an installation is equipped with:- planar magnetrons of PK-1500 series — up to 6 pie: 3 on each side;
- Target length up to 1700 mm with discharge power density: > 102W/cm2;
- Ion sources for ion etching and surface activation — up to 4 pie: 2 on each side;
- Tunnel type heater — up to 350 оC;
- Glow discharge systemсистемами;
- Reference voltage supply — up to 1,1 kW.
Installation total energy power — 180 КW.
The working chamber sizes for Installation basic version (mm): 8000х1800х500
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