Installation for scientific researchInstallation for scientific research designed by Moscow Institute for Steel and Alloys for Bauman Moscow State Technical University.
Installation uses combination of several methods of coating. In order to receive higher plasma ionization both balanced and non-balanced magnetrons are fixed inside the working area. Ionization increase allows more efficient control over the film deposition and feed –in of displacement potential onto the bottom layer.
Photo of the intra-chamber set-up of the laboratory installation:
In the photo:
- operation desk with the positioning driver
- ion emitter for non-conductor coating
- ion source for surface clearing
- outlet aperture of implantor’s ray beam